Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김명근 | - |
dc.contributor.author | 최준엽 | - |
dc.contributor.author | 이광렬 | - |
dc.contributor.author | 은광용 | - |
dc.date.accessioned | 2024-01-21T18:39:47Z | - |
dc.date.available | 2024-01-21T18:39:47Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 1997-02 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/143958 | - |
dc.title | Structure and Mechanical Properties of Si Incorporated Diamond-like Carbon Films Prepared y PACVD | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | J. Kor. Cer. Soc., v.3, no.2, pp.101 - 104 | - |
dc.citation.title | J. Kor. Cer. Soc. | - |
dc.citation.volume | 3 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 101 | - |
dc.citation.endPage | 104 | - |
dc.subject.keywordAuthor | DLC | - |
dc.subject.keywordAuthor | Si 함유 | - |
dc.subject.keywordAuthor | Structure | - |
dc.subject.keywordAuthor | Mechanical Properties | - |
dc.subject.keywordAuthor | Structural change | - |
dc.subject.keywordAuthor | Si Incorporation | - |
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