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dc.contributor.author김명근-
dc.contributor.author최준엽-
dc.contributor.author이광렬-
dc.contributor.author은광용-
dc.date.accessioned2024-01-21T18:39:47Z-
dc.date.available2024-01-21T18:39:47Z-
dc.date.created2022-01-10-
dc.date.issued1997-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143958-
dc.titleStructure and Mechanical Properties of Si Incorporated Diamond-like Carbon Films Prepared y PACVD-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationJ. Kor. Cer. Soc., v.3, no.2, pp.101 - 104-
dc.citation.titleJ. Kor. Cer. Soc.-
dc.citation.volume3-
dc.citation.number2-
dc.citation.startPage101-
dc.citation.endPage104-
dc.subject.keywordAuthorDLC-
dc.subject.keywordAuthorSi 함유-
dc.subject.keywordAuthorStructure-
dc.subject.keywordAuthorMechanical Properties-
dc.subject.keywordAuthorStructural change-
dc.subject.keywordAuthorSi Incorporation-
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