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Structure and Mechanical Properties of Si Incorporated Diamond-like Carbon Films Prepared y PACVD

Authors

김명근; 최준엽; 이광렬; 은광용

Issue Date

1997-02

Citation

J. Kor. Cer. Soc., v.3, no.2, pp.101 - 104

Keywords

DLC; Si 함유; Structure; Mechanical Properties; Structural change; Si Incorporation

URI

https://pubs.kist.re.kr/handle/201004/143958

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KIST Article > Others

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