Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, JK | - |
dc.contributor.author | Song, TK | - |
dc.contributor.author | Kim, TS | - |
dc.contributor.author | Jung, HJ | - |
dc.date.accessioned | 2024-01-21T18:42:05Z | - |
dc.date.available | 2024-01-21T18:42:05Z | - |
dc.date.created | 2022-01-11 | - |
dc.date.issued | 1997-01 | - |
dc.identifier.issn | 1058-4587 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/143998 | - |
dc.description.abstract | Crystal orientation of the SrBi2Ta2O9, CaBi2Ta2O9 thin films were controlled by the r.f. sputtering pressure. The Pt/SBTO/Pt capacitor having a c-axis oriented films shows P*r-P boolean AND r=16.3 mu C/cm(2) and Ec=50kV/cm which is superior than the films showing polycrystalline structure. The surface morphologies of the SrBi2Ta2O9 thin films show two kinds of grains which was changed by the sputtering conditions. | - |
dc.language | English | - |
dc.publisher | GORDON BREACH SCI PUBL LTD | - |
dc.subject | CAPACITORS | - |
dc.subject | ELECTRODES | - |
dc.subject | FATIGUE | - |
dc.title | Crystal orientation dependencies on the ferroelectric properties of SrBi2Ta2O9, CaBi2Ta2O9 thin films fabricated by the rf magnetron sputtering technique | - |
dc.type | Article | - |
dc.identifier.doi | 10.1080/10584589708221713 | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | INTEGRATED FERROELECTRICS, v.18, no.1-4, pp.369 - 376 | - |
dc.citation.title | INTEGRATED FERROELECTRICS | - |
dc.citation.volume | 18 | - |
dc.citation.number | 1-4 | - |
dc.citation.startPage | 369 | - |
dc.citation.endPage | 376 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.wosid | A1997YG17500034 | - |
dc.identifier.scopusid | 2-s2.0-0031332587 | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Physics | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.subject.keywordPlus | CAPACITORS | - |
dc.subject.keywordPlus | ELECTRODES | - |
dc.subject.keywordPlus | FATIGUE | - |
dc.subject.keywordAuthor | ferroelectric | - |
dc.subject.keywordAuthor | SrBi2Ta2O9 | - |
dc.subject.keywordAuthor | CaBi2Ta2O9 | - |
dc.subject.keywordAuthor | rf sputtering | - |
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