Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 윤영수 | - |
| dc.date.accessioned | 2024-01-21T19:03:37Z | - |
| dc.date.available | 2024-01-21T19:03:37Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1997-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/144133 | - |
| dc.title | Fabrication processes and problems of microelectromechanical system devices based on piezoelectric PZT film and surface micromachining techniques | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Ceramic technique., v.12, pp.364 - ? | - |
| dc.citation.title | Ceramic technique. | - |
| dc.citation.volume | 12 | - |
| dc.citation.startPage | 364 | - |
| dc.citation.endPage | ? | - |
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