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dc.contributor.author박용주-
dc.contributor.author김은규-
dc.contributor.author민석기-
dc.contributor.authorK. Ozasa-
dc.contributor.authorP. O'Keeffe-
dc.contributor.authorY. Aoyagi-
dc.date.accessioned2024-01-21T19:32:55Z-
dc.date.available2024-01-21T19:32:55Z-
dc.date.created2022-01-10-
dc.date.issued1996-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/144397-
dc.titleCharacteristics of a nitrogen gas-pulsed electron cyclotron resonance plasma-
dc.title.alternative질소 가스펄스 ECR 플라즈마의 특성-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation응용물리 = Ungyong Mulli (The Korean physical society), v.9, no.4, pp.444 - 449-
dc.citation.title응용물리 = Ungyong Mulli (The Korean physical society)-
dc.citation.volume9-
dc.citation.number4-
dc.citation.startPage444-
dc.citation.endPage449-
dc.subject.keywordAuthor질소 가스펄스 플라즈마-
dc.subject.keywordAuthorECR-
dc.subject.keywordAuthor전자온도-
dc.subject.keywordAuthortransient profile-
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