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고농도로 탄소도핑된 InGaAs 에피층의 전기적성질에 대한 급속열처리효과

Authors

손창식; 김성일; 민병돈; 김태근; 김용; 김무성; 김은규; 민석기; 최인훈

Issue Date

1996-05

Citation

응용물리 = Ungyong Mulli (The Korean physical society), v.9, no.3, pp.368 - 371

Keywords

carbondoping; InGaAs; rapid thermal annealing

URI

https://pubs.kist.re.kr/handle/201004/144451

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KIST Article > Others

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