Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이창우 | - |
| dc.contributor.author | 김용태 | - |
| dc.date.accessioned | 2024-01-21T19:45:33Z | - |
| dc.date.available | 2024-01-21T19:45:33Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1996-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/144613 | - |
| dc.title | 플라즈마 화학 증착된 질화텅스텐 박막의 불순물거동 및 확산특성 | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 새물리 = Sae Mulli (The Korean physical society), v.36, no.4, pp.371 - 375 | - |
| dc.citation.title | 새물리 = Sae Mulli (The Korean physical society) | - |
| dc.citation.volume | 36 | - |
| dc.citation.number | 4 | - |
| dc.citation.startPage | 371 | - |
| dc.citation.endPage | 375 | - |
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