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Study on formation of W-silicide in the doped-phosphorus poly-Si/SiO//2/Si-substrate.

Other Titles

인이 주입된 poly-Si/SiO//2/Si 기판에서 텅스텐 실리사이드의 형성에 관한 연구 =

Authors

정회환; 주병권; 오명환; 정관수

Issue Date

1996-01

Citation

전자공학회논문지, v.제 33 권 A 편, pp.126 - 134

URI

https://pubs.kist.re.kr/handle/201004/144651

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KIST Article > Others

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