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dc.contributor.author고석근-
dc.contributor.author장홍규-
dc.contributor.author정형진-
dc.contributor.author최원국-
dc.contributor.authorS.G. Kondranine-
dc.contributor.authorE.A. Kralkina-
dc.date.accessioned2024-01-21T20:02:52Z-
dc.date.available2024-01-21T20:02:52Z-
dc.date.created2022-01-10-
dc.date.issued1996-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/144674-
dc.titleInvestigation of new ionized cluster beam source-
dc.title.alternative새로운 이온화된 클라스터 빔원의 제작과 특성 조사-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationJournal of the Korean vacuum society, v.5, no.3, pp.251 - 257-
dc.citation.titleJournal of the Korean vacuum society-
dc.citation.volume5-
dc.citation.number3-
dc.citation.startPage251-
dc.citation.endPage257-
dc.subject.keywordAuthorICB-
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