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A formation of carbon micro-pattern by laser-induced deposition with CCl//2F//2 gas.

Authors

김성일; 민석기; 김은규; 박세기; 이천

Issue Date

1996-01

Citation

Bulletin of the Korean physical society, v.v. 14, no.no. 2, pp.543 - ?

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/144679

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KIST Article > Others

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