DSpace at KIST: Design of electrostatic bonding equipment for large area and the effect of contamination particle on the Si-glass electrostatic bonding.

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DC Field	Value	Language
dc.contributor.author	문제도	-
dc.contributor.author	오재열	-
dc.contributor.author	조영래	-
dc.contributor.author	정효수	-
dc.contributor.author	주병권	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T20:05:09Z	-
dc.date.available	2024-01-21T20:05:09Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144713	-
dc.title	Design of electrostatic bonding equipment for large area and the effect of contamination particle on the Si-glass electrostatic bonding.	-
dc.title.alternative	대면적 정전 접합 장치 고안 및 Si과 glass접합에 미치는 불순물의 영향	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국재료학회지 = Korean journal of materials research, v.6, no.1, pp.3 - 11	-
dc.citation.title	한국재료학회지 = Korean journal of materials research	-
dc.citation.volume	6	-
dc.citation.number	1	-
dc.citation.startPage	3	-
dc.citation.endPage	11	-

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