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Lateral growth rate enhancement on patterned GaAs substrate in [001] direction with CCl//4 by MOCVD.

Authors

김성일; 민석기; 황성민; 김은규; 민병돈; 이민석; 맹선재

Issue Date

1996-01

Citation

Bulletin of the Korean physical society, v.v. 14, no.no. 1, pp.239 - ?

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/144724

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KIST Article > Others

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