DSpace at KIST: Surfae analysis of PZT film prepared by sputtering method.

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DC Field	Value	Language
dc.contributor.author	김영관	-
dc.contributor.author	박주상	-
dc.contributor.author	추정우	-
dc.contributor.author	손병청	-
dc.contributor.author	이전국	-
dc.date.accessioned	2024-01-21T20:07:46Z	-
dc.date.available	2024-01-21T20:07:46Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144758	-
dc.title	Surfae analysis of PZT film prepared by sputtering method.	-
dc.title.alternative	Sputtering 법에 의해 성장시킨 PZT 막막의 표면 분석 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국진공학회지 = Journal of Korean vacuum society, v.v. 5, no.no. 2, pp.107 - ?	-
dc.citation.title	한국진공학회지 = Journal of Korean vacuum society	-
dc.citation.volume	v. 5	-
dc.citation.number	no. 2	-
dc.citation.startPage	107	-
dc.citation.endPage	?	-

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