DSpace at KIST: Reactive-metal ion beam과 산소 가스 ion beam 및 hybrid ion beam에 의한 주석 산화물 박막 물성 비교 연구

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DC Field	Value	Language
dc.contributor.author	송석균	-
dc.contributor.author	최원국	-
dc.contributor.author	정형진	-
dc.contributor.author	고석근	-
dc.contributor.author	이정용	-
dc.contributor.author	백홍구	-
dc.date.accessioned	2024-01-21T20:09:34Z	-
dc.date.available	2024-01-21T20:09:34Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-01	-
dc.identifier.issn	1013-7009	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144789	-
dc.language	Korean	-
dc.publisher	한국물리학회	-
dc.title	Reactive-metal ion beam과 산소 가스 ion beam 및 hybrid ion beam에 의한 주석 산화물 박막 물성 비교 연구	-
dc.title.alternative	Property of tin-oxide thin films grown using a reactive-metal ion beam, an oxygen gas ion beam, and a hybrid ion beam	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	응용물리, v.9, no.5, pp.686 - 694	-
dc.citation.title	응용물리	-
dc.citation.volume	9	-
dc.citation.number	5	-
dc.citation.startPage	686	-
dc.citation.endPage	694	-
dc.description.isOpenAccess	N	-
dc.description.journalRegisteredClass	other	-
dc.subject.keywordAuthor	ion beam	-

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