DSpace at KIST: A study on the film-formation mechanism by ionized cluster beam deposition.

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DC Field	Value	Language
dc.contributor.author	신치범	-
dc.contributor.author	이경호	-
dc.contributor.author	윤경석	-
dc.contributor.author	황경순	-
dc.contributor.author	문상흡	-
dc.contributor.author	조원일	-
dc.date.accessioned	2024-01-21T20:10:55Z	-
dc.date.available	2024-01-21T20:10:55Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144812	-
dc.title	A study on the film-formation mechanism by ionized cluster beam deposition.	-
dc.title.alternative	이온화 클러스터 빔 증착의 박막형성 기구에 관한 연구 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	공업화학, v.v. 7, no.no. 3, pp.464 - 472	-
dc.citation.title	공업화학	-
dc.citation.volume	v. 7	-
dc.citation.number	no. 3	-
dc.citation.startPage	464	-
dc.citation.endPage	472	-

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