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dc.contributor.authorKOH, SK-
dc.contributor.authorSONG, SK-
dc.contributor.authorCHOI, WK-
dc.contributor.authorJUNG, HJ-
dc.contributor.authorGONTCHAROV, L-
dc.date.accessioned2024-01-21T20:32:34Z-
dc.date.available2024-01-21T20:32:34Z-
dc.date.created2021-09-01-
dc.date.issued1995-11-
dc.identifier.issn0034-6748-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/144945-
dc.description.abstractA Kaufman-type 5 cm convex gridded ion-beam source is characterized in terms of angle-resolved ion-beam current density and beam uniformity at various discharge currents, electromagnet currents, and acceleration potentials. (C) 1995 American Institute of Physics.-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.titleUNIFORM BEAM PROFILES OF 5 CM CONVEX GRIDDED ION-BEAM SOURCE-
dc.typeArticle-
dc.identifier.doi10.1063/1.1146475-
dc.description.journalClass1-
dc.identifier.bibliographicCitationREVIEW OF SCIENTIFIC INSTRUMENTS, v.66, no.11, pp.5379 - 5380-
dc.citation.titleREVIEW OF SCIENTIFIC INSTRUMENTS-
dc.citation.volume66-
dc.citation.number11-
dc.citation.startPage5379-
dc.citation.endPage5380-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosidA1995TE62300050-
dc.identifier.scopusid2-s2.0-0000867233-
dc.relation.journalWebOfScienceCategoryInstruments & Instrumentation-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaInstruments & Instrumentation-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeNote-
dc.subject.keywordPlusDEPOSITION-
dc.subject.keywordAuthorion beam source-
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