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UNIFORM BEAM PROFILES OF 5 CM CONVEX GRIDDED ION-BEAM SOURCE

Authors
KOH, SK; SONG, SK; CHOI, WK; JUNG, HJ; GONTCHAROV, L
Issue Date
1995-11
Publisher
AMER INST PHYSICS
Citation
REVIEW OF SCIENTIFIC INSTRUMENTS, v.66, no.11, pp.5379 - 5380
Abstract
A Kaufman-type 5 cm convex gridded ion-beam source is characterized in terms of angle-resolved ion-beam current density and beam uniformity at various discharge currents, electromagnet currents, and acceleration potentials. (C) 1995 American Institute of Physics.
Keywords
DEPOSITION; ion beam source
ISSN
0034-6748
URI
https://pubs.kist.re.kr/handle/201004/144945
DOI
10.1063/1.1146475
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KIST Article > Others
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