DSpace at KIST: The effects of heat treatments of permalloy targets on the deposition rates of thin films

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DC Field	Value	Language
dc.contributor.author	김희중	-
dc.contributor.author	김현태	-
dc.contributor.author	한석희	-
dc.contributor.author	강일구	-
dc.contributor.author	김인응	-
dc.contributor.author	김상주	-
dc.date.accessioned	2024-01-21T20:41:00Z	-
dc.date.available	2024-01-21T20:41:00Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1995-05	-
dc.identifier.issn	0253-3847	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145086	-
dc.title	The effects of heat treatments of permalloy targets on the deposition rates of thin films	-
dc.title.alternative	박막의 증착 속도에 미치는 타게트 열처리조건의 영향	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	대한금속학회지 = Journal of the Korean Institute of Metals, v.33, no.5, pp.591 - 598	-
dc.citation.title	대한금속학회지 = Journal of the Korean Institute of Metals	-
dc.citation.volume	33	-
dc.citation.number	5	-
dc.citation.startPage	591	-
dc.citation.endPage	598	-
dc.subject.keywordAuthor	박막	-
dc.subject.keywordAuthor	증착속도	-
dc.subject.keywordAuthor	퍼멀로이 타게트	-
dc.subject.keywordAuthor	잔류응력	-

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