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In-situ process 에 의한 indium oxide 의 선택성장과 GaAs 패턴에칭 .

Authors

김은규; K. Ozasa; Y. Aoyaki; 민석기

Issue Date

1995-03

Citation

응용물리, v.v. 8, no.no. 2, pp.157 - 161

Keywords

in-situ process

URI

https://pubs.kist.re.kr/handle/201004/145156

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KIST Article > Others

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