DSpace at KIST: Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis

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DC Field	Value	Language
dc.contributor.author	임상우	-
dc.contributor.author	설용건	-
dc.contributor.author	최지원	-
dc.contributor.author	이전국	-
dc.contributor.author	정형진	-
dc.date.accessioned	2024-01-21T21:02:40Z	-
dc.date.available	2024-01-21T21:02:40Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1995-01	-
dc.identifier.issn	0304-128X	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145222	-
dc.publisher	한국화학공학회 / Korean Institute of Chemical Engineers	-
dc.title	Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis	-
dc.title.alternative	RF magnetron sputtering 법을 이용한 압전성 ZnO 박막의 제조 및 그 표면분석	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	화학공학 = Journal of the Korean Institute of Chemical Engineers, v.33, no.2, pp.235 - 242	-
dc.citation.title	화학공학 = Journal of the Korean Institute of Chemical Engineers	-
dc.citation.volume	33	-
dc.citation.number	2	-
dc.citation.startPage	235	-
dc.citation.endPage	242	-

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