DSpace at KIST: Measurements of lattice strain in SiO//2Si interface using convergent beam electron diffraction.

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DC Field	Value	Language
dc.contributor.author	김긍호	-
dc.contributor.author	우현정	-
dc.contributor.author	최두진	-
dc.date.accessioned	2024-01-21T21:05:02Z	-
dc.date.available	2024-01-21T21:05:02Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1995-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145262	-
dc.title	Measurements of lattice strain in SiO//2Si interface using convergent beam electron diffraction.	-
dc.title.alternative	수렴성빔 전자회절법을 이용한 SiO//2Si 계면 부위의 격자 변형량 측정 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국전자현미경학회지 = Korean journal of electron microscopy, v.v. 25, no.no. 2, pp.73 - 79	-
dc.citation.title	한국전자현미경학회지 = Korean journal of electron microscopy	-
dc.citation.volume	v. 25	-
dc.citation.number	no. 2	-
dc.citation.startPage	73	-
dc.citation.endPage	79	-
dc.subject.keywordAuthor	lattice strain	-

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