DSpace at KIST: Effects of preferred orientation and microstructure on mechanical properties of chemically vapor deposited SiC.

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DC Field	Value	Language
dc.contributor.author	김동주	-
dc.contributor.author	김영욱	-
dc.contributor.author	박상환	-
dc.contributor.author	최두진	-
dc.contributor.author	이준근	-
dc.date.accessioned	2024-01-21T21:11:05Z	-
dc.date.available	2024-01-21T21:11:05Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1995-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145365	-
dc.title	Effects of preferred orientation and microstructure on mechanical properties of chemically vapor deposited SiC.	-
dc.title.alternative	화학증착 탄화규소막의 방향성과 미세구조가 증착층의 기계적 성질에 미치는 영향 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	Journal of the Korean ceramic society = 한국요업학회지, v.v. 32, no.no. 10, pp.1103 - 1110	-
dc.citation.title	Journal of the Korean ceramic society = 한국요업학회지	-
dc.citation.volume	v. 32	-
dc.citation.number	no. 10	-
dc.citation.startPage	1103	-
dc.citation.endPage	1110	-
dc.subject.keywordAuthor	SiC film	-

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