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dc.contributor.author주병권-
dc.contributor.author하병주-
dc.contributor.author김근섭-
dc.contributor.author송만호-
dc.contributor.author김성환-
dc.contributor.author김철주-
dc.contributor.author차균현-
dc.contributor.author오명환-
dc.date.accessioned2024-01-21T21:32:05Z-
dc.date.available2024-01-21T21:32:05Z-
dc.date.created2022-01-10-
dc.date.issued1994-10-
dc.identifier.issn1225-5475-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145490-
dc.publisher한국센서학회-
dc.titleFormation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication-
dc.title.alternative실리콘 직접 접합 / 전기화학적 식각정지를 이용한 실리콘 다이아프램의 형성과 실리콘 압력센서 제조에의 응용-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation센서학회지, v.3, no.3, pp.45 - 53-
dc.citation.title센서학회지-
dc.citation.volume3-
dc.citation.number3-
dc.citation.startPage45-
dc.citation.endPage53-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthormicromachining-
dc.subject.keywordAuthorwafer bonding-
dc.subject.keywordAuthorelectrochemical etch stop-
dc.subject.keywordAuthormicromechanical structure-
dc.subject.keywordAuthorpressure sensor-
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