DSpace at KIST: Fabrication of a Humidity Sensing Device using Silicon Thermopile

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DC Field	Value	Language
dc.contributor.author	김태윤	-
dc.contributor.author	주병권	-
dc.contributor.author	오명환	-
dc.contributor.author	박정호	-
dc.date.accessioned	2024-01-21T21:39:09Z	-
dc.date.available	2024-01-21T21:39:09Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1994-04	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145608	-
dc.title	Fabrication of a Humidity Sensing Device using Silicon Thermopile	-
dc.title.alternative	실리콘 Thermopile을 이용한 감습 소자의 제작	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	전자공학회논문지, v.31A, no.4, pp.70 - 76	-
dc.citation.title	전자공학회논문지	-
dc.citation.volume	31A	-
dc.citation.number	4	-
dc.citation.startPage	70	-
dc.citation.endPage	76	-
dc.subject.keywordAuthor	MEMS	-
dc.subject.keywordAuthor	micromachining	-
dc.subject.keywordAuthor	micromechanical structure	-
dc.subject.keywordAuthor	flow sensor	-

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