DSpace at KIST: Study on the bonding interface in directly-bonded Si-Si and Si-SiO2/Si wafer pairs

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	방준호	-
dc.contributor.author	이윤희	-
dc.contributor.author	박종완	-
dc.contributor.author	차균현	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T21:39:27Z	-
dc.date.available	2024-01-21T21:39:27Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1994-04	-
dc.identifier.issn	1225-0562	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145613	-
dc.title	Study on the bonding interface in directly-bonded Si-Si and Si-SiO2/Si wafer pairs	-
dc.title.alternative	직접 접합된 Si-Si, Si-SiO2/Si 기판쌍의 접합 계면에 관한 연구	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국재료학회지 = Korean Journal of Materials Research, v.4, no.2, pp.127 - 135	-
dc.citation.title	한국재료학회지 = Korean Journal of Materials Research	-
dc.citation.volume	4	-
dc.citation.number	2	-
dc.citation.startPage	127	-
dc.citation.endPage	135	-
dc.subject.keywordAuthor	micromachining	-
dc.subject.keywordAuthor	wafer bonding	-
dc.subject.keywordAuthor	bonding interface	-

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