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dc.contributor.author주병권-
dc.contributor.author고창기-
dc.contributor.author김철주-
dc.contributor.author차균현-
dc.contributor.author오명환-
dc.date.accessioned2024-01-21T21:41:03Z-
dc.date.available2024-01-21T21:41:03Z-
dc.date.created2022-01-10-
dc.date.issued1994-02-
dc.identifier.issn1225-5475-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145638-
dc.publisher한국센서학회-
dc.titleFabrication and characterization of silicon devices for flow measurement (II)-
dc.title.alternative흐름측정용 실리콘 소자의 제작 및 특성 평가 (II)-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation센서학회지, v.3, no.1, pp.12 - 18-
dc.citation.title센서학회지-
dc.citation.volume3-
dc.citation.number1-
dc.citation.startPage12-
dc.citation.endPage18-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthormicromachining-
dc.subject.keywordAuthormicromechanical structure-
dc.subject.keywordAuthorflow sensor-
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