DSpace at KIST: Fabrication and characterization of silicon devices for flow measurement (II)

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	고창기	-
dc.contributor.author	김철주	-
dc.contributor.author	차균현	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T21:41:03Z	-
dc.date.available	2024-01-21T21:41:03Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1994-02	-
dc.identifier.issn	1225-5475	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145638	-
dc.publisher	한국센서학회	-
dc.title	Fabrication and characterization of silicon devices for flow measurement (II)	-
dc.title.alternative	흐름측정용 실리콘 소자의 제작 및 특성 평가 (II)	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	센서학회지, v.3, no.1, pp.12 - 18	-
dc.citation.title	센서학회지	-
dc.citation.volume	3	-
dc.citation.number	1	-
dc.citation.startPage	12	-
dc.citation.endPage	18	-
dc.subject.keywordAuthor	MEMS	-
dc.subject.keywordAuthor	micromachining	-
dc.subject.keywordAuthor	micromechanical structure	-
dc.subject.keywordAuthor	flow sensor	-

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