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Novel facet evolution of carbon-doped AlGaAs/GaAs multilayers on nonplanar substrate using CCl//4 grown by metalorganic chemical vapor deposition (MOCVD).

Authors

김성일; 민석기; 김용; 김무성; 박양근; 안준오

Issue Date

1994-01

Citation

Bull. Korean phys. soc., v.v. 12, no.no. 2, pp.? - ?

Keywords

MOCVD; GaAs; AlGaAs

URI

https://pubs.kist.re.kr/handle/201004/145672

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KIST Article > Others

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