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dc.contributor.author이동헌-
dc.contributor.author조용수-
dc.contributor.author이월인-
dc.contributor.author이전국-
dc.contributor.author정형진-
dc.date.accessioned2024-01-21T21:43:43Z-
dc.date.available2024-01-21T21:43:43Z-
dc.date.created2022-01-10-
dc.date.issued1994-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145682-
dc.titleCharacterization of nitrogen-doped TiO2 thin films prepared by metalorganic chemical vapor deposition-
dc.title.alternative유기금속 화학 기상증착법으로 실리콘 기판위에 증착된 질소치환 TiO2 박막의 특성분석-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation한국요업학회지, v.31, no.12, pp.1577 - 1587-
dc.citation.title한국요업학회지-
dc.citation.volume31-
dc.citation.number12-
dc.citation.startPage1577-
dc.citation.endPage1587-
dc.subject.keywordAuthorMOCVD-
dc.subject.keywordAuthorTiO2-
dc.subject.keywordAuthor질소치환-
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