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dc.contributor.author박달근-
dc.contributor.author전병수-
dc.contributor.author이중기-
dc.contributor.author신세희-
dc.date.accessioned2024-01-21T21:46:26Z-
dc.date.available2024-01-21T21:46:26Z-
dc.date.created2022-01-10-
dc.date.issued1994-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145728-
dc.titlePreparation of large area TiO2 thin films by low pressure chemical vapor deposition-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation한국재료학회지, v.24, no.8, pp.861 - 869-
dc.citation.title한국재료학회지-
dc.citation.volume24-
dc.citation.number8-
dc.citation.startPage861-
dc.citation.endPage869-
dc.subject.keywordAuthorCVD-
dc.subject.keywordAuthortitanium dioxide-
dc.subject.keywordAuthorthin film-
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