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dc.contributor.author안광덕-
dc.contributor.author구덕일-
dc.contributor.author정찬문-
dc.date.accessioned2024-01-21T22:02:14Z-
dc.date.available2024-01-21T22:02:14Z-
dc.date.created2022-01-10-
dc.date.issued1994-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145766-
dc.titleTerpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationJournal of photopolymer science and technology, v.v. 7, no.no. 3, pp.473 - 482-
dc.citation.titleJournal of photopolymer science and technology-
dc.citation.volumev. 7-
dc.citation.numberno. 3-
dc.citation.startPage473-
dc.citation.endPage482-
dc.subject.keywordAuthorfunctional polymaleimides-
dc.subject.keywordAuthortosyloxymaleimide-
dc.subject.keywordAuthorpolymeric photoacid generator-
dc.subject.keywordAuthorsingle-component resists-
dc.subject.keywordAuthorchemical amplification resists-
dc.subject.keywordAuthorphotoresists-
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