DSpace at KIST: Atomic force microcopy를 이용한 Al0.5Ga0.5As/GaAs 다층 에피층구조의 단면관찰에 관한 연구

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DC Field	Value	Language
dc.contributor.author	김용	-
dc.contributor.author	김희진	-
dc.contributor.author	김재성	-
dc.contributor.author	김무성	-
dc.contributor.author	민석기	-
dc.date.accessioned	2024-01-21T22:05:41Z	-
dc.date.available	2024-01-21T22:05:41Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1994-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/145823	-
dc.title	Atomic force microcopy를 이용한 Al0.5Ga0.5As/GaAs 다층 에피층구조의 단면관찰에 관한 연구	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	응용물리, v.7, pp.124	-
dc.citation.title	응용물리	-
dc.citation.volume	7	-
dc.citation.startPage	124	-
dc.subject.keywordAuthor	AFM	-
dc.subject.keywordAuthor	MOCVD	-
dc.subject.keywordAuthor	crossection	-
dc.subject.keywordAuthor	observation	-
dc.subject.keywordAuthor	stain etching	-

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