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MBE 장치에 의한 에피성장 균일도 계산 .

Authors

김은규; 윤경식; 민석기

Issue Date

1993-08

Citation

대한전자공학회지, v.v. 30A, no.no. 8, pp.671 - 677

Keywords

MBE; GaAs epi-layer; computer simulation

URI

https://pubs.kist.re.kr/handle/201004/146003

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KIST Article > Others

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