TRISILAALKANES - NEW PRECURSORS FOR ULTRAFINE BETA-SILICON CARBIDE POWDERS
- Authors
- LEE, GH; SONG, CH; JUNG, IN
- Issue Date
- 1993-02-20
- Publisher
- KOREAN CHEMICAL SOC
- Citation
- BULLETIN OF THE KOREAN CHEMICAL SOCIETY, v.14, no.1, pp.5 - 9
- Keywords
- CHEMICAL VAPOR-DEPOSITION; GAS-PHASE REACTION; SIH4-CH4-H2 SYSTEM; SIC POWDERS; CARBOSILANES; PARTICLES; CHEMICAL VAPOR-DEPOSITION; GAS-PHASE REACTION; SIH4-CH4-H2 SYSTEM; SIC POWDERS; CARBOSILANES; PARTICLES; trisilaalkanes; new precursor; ultrafine; silicon carbide; powders
- ISSN
- 0253-2964
- URI
- https://pubs.kist.re.kr/handle/201004/146102
- Appears in Collections:
- KIST Article > Others
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