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dc.contributor.author박용주-
dc.contributor.author김무성-
dc.contributor.author김용-
dc.contributor.author조훈영-
dc.contributor.author김성일-
dc.contributor.author민석기-
dc.contributor.author엄경숙-
dc.date.accessioned2024-01-21T22:38:54Z-
dc.date.available2024-01-21T22:38:54Z-
dc.date.created2022-01-10-
dc.date.issued1993-01-
dc.identifier.issn1225-0562-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146148-
dc.languageKorean-
dc.publisher한국재료학회-
dc.titleGaAs 집적회로 제조를 위한 에피 성장 연구-
dc.title.alternativeEpitaxial growth for GaAs IC.-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국재료학회지, v.v. 3, no.no. 6, pp.645 - 651-
dc.citation.title한국재료학회지-
dc.citation.volumev. 3-
dc.citation.numberno. 6-
dc.citation.startPage645-
dc.citation.endPage651-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasskci-
dc.subject.keywordAuthor반절연기판-
dc.subject.keywordAuthorMOCVD-
dc.subject.keywordAuthorMBE-
dc.subject.keywordAuthor누설전류-
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