DSpace at KIST: Performance of the plasma deposited tungsten nitride diffusion barrier for Al and Au metallization.

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DC Field	Value	Language
dc.contributor.author	김용태	-
dc.contributor.author	이창우	-
dc.contributor.author	민석기	-
dc.date.accessioned	2024-01-21T22:39:12Z	-
dc.date.available	2024-01-21T22:39:12Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1993-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146153	-
dc.title	Performance of the plasma deposited tungsten nitride diffusion barrier for Al and Au metallization.	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	Jpn. j. of appl. phys., v.v. 32, pp.6126 - 6131	-
dc.citation.title	Jpn. j. of appl. phys.	-
dc.citation.volume	v. 32	-
dc.citation.startPage	6126	-
dc.citation.endPage	6131	-

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