DSpace at KIST: Fabrication and characterization of silicon device for flow measurement (I)

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DC Field	Value	Language
dc.contributor.author	강광남	-
dc.contributor.author	이정일	-
dc.contributor.author	오명환	-
dc.contributor.author	김형곤	-
dc.contributor.author	주병권	-
dc.contributor.author	이명복	-
dc.date.accessioned	2024-01-21T22:44:28Z	-
dc.date.available	2024-01-21T22:44:28Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1993-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146242	-
dc.title	Fabrication and characterization of silicon device for flow measurement (I)	-
dc.title.alternative	흐름측정용 실리콘 소자의 제작 및 특성 평가 (I)	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국재료학회지 = Korean journal of materials research, v.3, no.1, pp.28 - 32	-
dc.citation.title	한국재료학회지 = Korean journal of materials research	-
dc.citation.volume	3	-
dc.citation.number	1	-
dc.citation.startPage	28	-
dc.citation.endPage	32	-
dc.subject.keywordAuthor	실리콘 소자	-

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