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dc.contributor.author최원국-
dc.contributor.author윤덕주-
dc.contributor.author공병인-
dc.contributor.author김창현-
dc.contributor.author황정남-
dc.contributor.author정광호-
dc.date.accessioned2024-01-21T23:02:03Z-
dc.date.available2024-01-21T23:02:03Z-
dc.date.created2022-01-10-
dc.date.issued1993-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146313-
dc.titleThe study on thin film fabrication using UHV-LCVD system (I)-
dc.title.alternativeUHV-LCVD 장치를 이용한 박막제작에 관한 연구 (I) : 장치 제작을 중심으로-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationJournal of the Korean vacuum society, v.2, no.2, pp.255 - 260-
dc.citation.titleJournal of the Korean vacuum society-
dc.citation.volume2-
dc.citation.number2-
dc.citation.startPage255-
dc.citation.endPage260-
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