Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김은규 | - |
| dc.contributor.author | 조훈영 | - |
| dc.contributor.author | 민석기 | - |
| dc.contributor.author | 최원철 | - |
| dc.contributor.author | 박종윤 | - |
| dc.contributor.author | 김현수 | - |
| dc.date.accessioned | 2024-01-21T23:09:15Z | - |
| dc.date.available | 2024-01-21T23:09:15Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1992-06 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/146432 | - |
| dc.title | Excimer laser illumination 에 따른 실리콘반도체 특성변화 . | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 새물리, v.v. 32, no.no. 3, pp.395 - 400 | - |
| dc.citation.title | 새물리 | - |
| dc.citation.volume | v. 32 | - |
| dc.citation.number | no. 3 | - |
| dc.citation.startPage | 395 | - |
| dc.citation.endPage | 400 | - |
| dc.subject.keywordAuthor | excimer laser | - |
| dc.subject.keywordAuthor | Si | - |
| dc.subject.keywordAuthor | laser illumination | - |
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