Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오명환 | - |
| dc.contributor.author | 주병권 | - |
| dc.date.accessioned | 2024-01-21T23:11:49Z | - |
| dc.date.available | 2024-01-21T23:11:49Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1992-02 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/146475 | - |
| dc.title | 마이크로 박막 센서의 기술동향 | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 전기학회지 ., v.41, no.2, pp.6 - 11 | - |
| dc.citation.title | 전기학회지 . | - |
| dc.citation.volume | 41 | - |
| dc.citation.number | 2 | - |
| dc.citation.startPage | 6 | - |
| dc.citation.endPage | 11 | - |
| dc.subject.keywordAuthor | MEMS | - |
| dc.subject.keywordAuthor | micromachining | - |
| dc.subject.keywordAuthor | microsensor | - |
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