DSpace at KIST: A Formation of Thin Film by Ionized Cluster Beam Deposition

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DC Field	Value	Language
dc.contributor.author	정형진	-
dc.contributor.author	고석근	-
dc.contributor.author	임종태	-
dc.contributor.author	송석준	-
dc.date.accessioned	2024-01-21T23:15:08Z	-
dc.date.available	2024-01-21T23:15:08Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1992-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146529	-
dc.title	A Formation of Thin Film by Ionized Cluster Beam Deposition	-
dc.title.alternative	이온 크러스터빔 (Ionized Cluster Beam) 증착에 의한 박막형성 .	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	대한금속학회회보, v.v. 5, no.no. 2, pp.137 - 143	-
dc.citation.title	대한금속학회회보	-
dc.citation.volume	v. 5	-
dc.citation.number	no. 2	-
dc.citation.startPage	137	-
dc.citation.endPage	143	-

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