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Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process

Other Titles

Sol-gel 법으로 제조된 Ta2O5 박막의 유전특성과 누설전류 특성

Authors

오태성; 이창봉; 이병찬; 오영제; 김윤호

Issue Date

1992-01

Citation

Journal of the Korean ceramic society = 한국요업학회지, v.29, no.1, pp.29 - 34

Keywords

sol-gel; Ta2O5 thin film; crystalline phase; dielectric properties; leakage current

URI

https://pubs.kist.re.kr/handle/201004/146560

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KIST Article > Others

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