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dc.contributor.author하병주-
dc.contributor.author주병권-
dc.contributor.author차균현-
dc.contributor.author오명환-
dc.contributor.author김철주-
dc.date.accessioned2024-01-21T23:17:06Z-
dc.date.available2024-01-21T23:17:06Z-
dc.date.created2022-01-10-
dc.date.issued1992-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146562-
dc.titleMicroscopy study for the batch fabrication of silicon diaphragm-
dc.title.alternative실리콘 diaphragm의 일괄 제조공정을 위한 microscopy study-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전자공학회논문지, v.29A, no.1, pp.33 - 40-
dc.citation.title전자공학회논문지-
dc.citation.volume29A-
dc.citation.number1-
dc.citation.startPage33-
dc.citation.endPage40-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthormicromachining-
dc.subject.keywordAuthorsilicon etching-
dc.subject.keywordAuthordiaphragm-
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