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텅스텐의 화학증착시 압력증가가 증착에 미치는 영향 ..

Authors

금동화; 윤호철; 이정중

Issue Date

1992-01

Citation

대한금속학회지, v.v. 30, no.no. 8, pp.955 - 962

URI

https://pubs.kist.re.kr/handle/201004/146565

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KIST Article > Others

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