DSpace at KIST: Short consideration on the non-uniformities existing at the etched-edges in deep anisotropic etching of (100) silicon

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	하병주	-
dc.contributor.author	김철주	-
dc.contributor.author	오명환	-
dc.contributor.author	차균현	-
dc.date.accessioned	2024-01-21T23:33:19Z	-
dc.date.available	2024-01-21T23:33:19Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1992-01	-
dc.identifier.issn	1225-0562	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146612	-
dc.title	Short consideration on the non-uniformities existing at the etched-edges in deep anisotropic etching of (100) silicon	-
dc.title.alternative	(100) 실리콘의 깊은 비등방성 식각시 식각면의 가장자리에 존재하는 불균일성의 짤막한 고찰	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국재료학회지 = Korean Journal of Materials Research, v.2, no.5, pp.383 - 386	-
dc.citation.title	한국재료학회지 = Korean Journal of Materials Research	-
dc.citation.volume	2	-
dc.citation.number	5	-
dc.citation.startPage	383	-
dc.citation.endPage	386	-
dc.subject.keywordAuthor	MEMS	-
dc.subject.keywordAuthor	micromachining	-
dc.subject.keywordAuthor	deep silicon etching	-
dc.subject.keywordAuthor	diaphragm	-

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