DSpace at KIST: 플라즈마화학증착 텅스텐박막의 특성에 미치는 H//2/WF//6 입력비의 역활 .

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DC Field	Value	Language
dc.contributor.author	김용태	-
dc.contributor.author	민석기	-
dc.contributor.author	홍종성	-
dc.contributor.author	강태원	-
dc.contributor.author	홍치유	-
dc.date.accessioned	2024-01-22T00:02:33Z	-
dc.date.available	2024-01-22T00:02:33Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1991-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146873	-
dc.title	플라즈마화학증착 텅스텐박막의 특성에 미치는 H//2/WF//6 입력비의 역활 .	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	새물리, v.v. 31, pp.569 - 573	-
dc.citation.title	새물리	-
dc.citation.volume	v. 31	-
dc.citation.startPage	569	-
dc.citation.endPage	573	-

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