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IC 기술을 이용한 자동차용 실리콘 가속센서

Authors

주병권; 오명환

Issue Date

1991-01

Citation

전자부품지 ., pp.50

Keywords

MEMS; micromachining; microsensor; acceleration sensor

URI

https://pubs.kist.re.kr/handle/201004/146879

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KIST Article > Others

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