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Plasma polymerization of hexamethyldisiloxane: effect of substrate temperature.

Authors

김낙중; 박수영; 이기풍; 송석규

Issue Date

1991-01

Citation

폴리머 = Polymer, v.v. 15, no.no. 1, pp.88 - ?

Keywords

plasma polymerization; plasma deposition; glow discharge; organosilicon

URI

https://pubs.kist.re.kr/handle/201004/146920

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KIST Article > Others

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