Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김용태 | - |
| dc.contributor.author | 민석기 | - |
| dc.contributor.author | 홍종성 | - |
| dc.contributor.author | 홍치유 | - |
| dc.date.accessioned | 2024-01-22T00:08:15Z | - |
| dc.date.available | 2024-01-22T00:08:15Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1991-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/146967 | - |
| dc.title | 플라즈마 Silane 환원반응에 의한 텅스텐박막의 증착 . | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 전자공학회논문지, v.v. 28A, no.no. 2, pp.134 - 141 | - |
| dc.citation.title | 전자공학회논문지 | - |
| dc.citation.volume | v. 28A | - |
| dc.citation.number | no. 2 | - |
| dc.citation.startPage | 134 | - |
| dc.citation.endPage | 141 | - |
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