Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김용태 | - |
| dc.contributor.author | 민석기 | - |
| dc.contributor.author | 김충기 | - |
| dc.date.accessioned | 2024-01-22T00:08:22Z | - |
| dc.date.available | 2024-01-22T00:08:22Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1991-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/146969 | - |
| dc.title | A new method to suppress encroachment by plasma deposited tungsten thin films. | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Appl. phys. lett., v.v. 59, pp.916 - 918 | - |
| dc.citation.title | Appl. phys. lett. | - |
| dc.citation.volume | v. 59 | - |
| dc.citation.startPage | 916 | - |
| dc.citation.endPage | 918 | - |
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