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dc.contributor.author조원일-
dc.contributor.author조병원-
dc.contributor.author이성래-
dc.contributor.author주재백-
dc.contributor.author윤경석-
dc.date.accessioned2024-01-22T00:09:05Z-
dc.date.available2024-01-22T00:09:05Z-
dc.date.created2022-01-10-
dc.date.issued1991-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146981-
dc.titleJournal of the Korean institute of chemical engineers-
dc.title.alternative스퍼터 증착된 LaF//3 박막의 구조 및 산소검지 특성 =-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation화학공학 =, v.v. 29, no.no. 5, pp.589 - 595-
dc.citation.title화학공학 =-
dc.citation.volumev. 29-
dc.citation.numberno. 5-
dc.citation.startPage589-
dc.citation.endPage595-
dc.subject.keywordAuthorcrystal structure-
dc.subject.keywordAuthoroxygen-
dc.subject.keywordAuthorsensing mechanism-
dc.subject.keywordAuthormicrocrystalline-
dc.subject.keywordAuthorpotentiostatic-
dc.subject.keywordAuthorgalvanostatic-
dc.subject.keywordAuthorhydrogen-
dc.subject.keywordAuthorLaF//3-
dc.subject.keywordAuthorthin film-
dc.subject.keywordAuthorsputtering-
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